Kapteyn-Murnane Group Nanoimaging

Nanoimaging

Coherent EUV beams can non-destructively image materials and buried structures, with chemical and compositional information, and diffraction-limited spatial resolution (~12 nm transverse, ~Å axial).

Coherent EUV beams can non-destructively image materials and buried structures, with chemical and compositional information, and diffraction-limited spatial resolution (~12 nm transverse, ~脜 axial).听听 (top and center) Coherent imaging of a semiconducting sample from imec, showing transverse and depth-resolved composition and doping. (bottom) First sub-wavelength imaging at short wavelengths.听

Pushing short wavelength imaging to the fundamental limits

Although x-ray imaging has been explored for decades, and visible-wavelength microscopy for centuries, it is only recently that the spectral region in between鈥晅he extreme ultraviolet (EUV)鈥昲as been explored for imaging nanostructures and nanomaterials. With the practical implementation of coherent EUV light sources based on high harmonic generation (HHG), combined with coherent diffractive imaging (CDI), we have shown that EUV imaging has unique advantages. This is important because for synthesis and integration of a host of next-generation materials and nanostructures, new approaches are needed to non-destructively and routinely determine interfacial and layer structure as well as surface morphology, with sensitivity to dopant distributions and material composition

In recent research we demonstrated the first sub-wavelength imaging at short wavelengths using any light source, small or large.[6] This microscope achieved ~12 nm transverse, and ~脜 axial resolution. We also developed the first full field dynamic imaging microscope, with 10fs temporal resolution. Finally, we developed the first phase-sensitive EUV imaging reflectometer. It combines the excellent phase stability of coherent high harmonic sources with the unique chemical- and phase- sensitivity of EUV reflectometry, and with state-of-the-art ptychography imaging algorithms. This tabletop microscope can non-destructively probe surface topography, layer thicknesses, and interface quality, as well as dopant concentrations and profiles.

Related Publications
  1. M.听Tanksalvala, C. Porter, Y. Esashi, G.Miley, N. Horiguchi, R. Karl, P. Johnsen, C. Bevis, N. Jenkins, B. Wang, X. Zhang, S. Cousin, D. Adams, M. Gerrity, H. Kapteyn, M. Murnane,听鈥淣on-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry,鈥澨submitted (2020).
  2. R. Karl Jr., G. Mancini, J. Knobloch, T. Frazer, J. Hernandez-Charpak, B. Abad, D. Gardner, E. Shanblatt, M. Tanksalvala, C. Porter, C. Bevis, D. Adams, H. Kapteyn, M. Murnane,听鈥淔ull-field imaging of thermal and acoustic dynamics in an individual nanostructure using tabletop high harmonic beams,鈥听Science Advances听4, eaau4295 (2018).听
  3. G. Mancini, R. Karl, E. Shanblatt, C. Bevis, D. Gardner, M. Tanksalvala, J. Russell, D. Adams, H. Kapteyn, J. Badding, T. Mallouk, M. Murnane,听鈥淐olloidal crystal order and structure revealed by tabletop extreme ultraviolet scattering and coherent diffractive imaging,鈥听Optics Express听26(9) 11393鈥11406 (2018).听
  4. C. Bevis, R. Karl Jr., J. Reichanadter, D. Gardner, C. Porter,E. Shanblatt, M. Tanksalvala, G. Mancini, H. Kapteyn, M. Murnane, D. Adams,听鈥淢ultiple beam ptychography for large field-of-view, high throughput, quantitative phase contrast imaging,鈥听Ultramicroscopy听184, 164鈥171 (2018).听
  5. C. Porter, M. Tanksalvala, M. Gerrity, G. Miley, X. Zhang, C. Bevis, E. Shanblatt, R. Karl, M. Murnane, D. Adams, H. Kapteyn,听鈥淕eneral-purpose, wide field-of-view reflection imaging with a tabletop 13nm light source,鈥听Optica听4(12) 1552鈥1557 (2017).听
  6. D. Gardner, M. Tanksalvala, E. Shanblatt, X. Zhang, B. Galloway, C. Porter, R. Karl Jr., C. Bevis, D. Adams, H. Kapteyn, M. Murnane, G. Mancini,听鈥淪ubwavelength coherent imaging of periodic samples using a 13.5 nm tabletop high-harmonic light source,鈥听Nature Photonics听11, 259 (2017).听
  7. E. Shanblatt, C. Porter, D. Gardner, G. Mancini, R. Karl Jr., M. Tanksalvala, C. Bevis, V. Vartanian, H. Kapteyn, D. Adams, M. Murnane,听鈥淨uantitative Chemically Specific Coherent Diffractive Imaging of Reactions at Buried Interfaces with Few Nanometer Precision,鈥听Nano Letters听16听(9), 5444鈥5450 (2016).听
  8. B. Zhang, D. F. 听Gardner, M. D. 听Seaberg, E. R. Shanblatt, Henry C. Kapteyn, Margaret M. Murnane, D. E. 听Adams,听鈥淗igh contrast 3D imaging of surfaces near the wavelength limit using tabletop EUV ptychography,鈥听Ultramicroscopy听158, 98鈥104 (2015).听听Featured on Cover.
  9. J. Miao, T. Ishikawa, I. K. Robinson, M. M. Murnane,听鈥淏eyond crystallography: Diffractive imaging using coherent X-ray light sources,鈥听Science 348, 530 (2015). DOI: 10.1126/science.aaa1394听Featured on cover of Science.
  10. M. D. Seaberg, B. Zhang, D. F. Gardner, E.听 R. Shanblatt, M.M. Murnane, H. C. Kapteyn, D.E. Adams, 鈥淭abletop nanometer extreme ultraviolet imaging in an extended reflection mode using coherent Fresnel ptychography,鈥 Optica听1, 39 (2014).听
  11. B. Zhang, M. Seaberg, J. Shaw, D. Gardner, D. Adams, M. Murnane, H. Kapteyn,听鈥淔ull field tabletop EUV coherent diffractive imaging in a transmission geometry,鈥听Optics Express听21, 21970 (2013).听 ).
  12. R.L. Sandberg, D. A. Raymondson, C. La-o-vorakiat, A. Paul, K. S. Raines, J. Miao, M. M. Murnane, H. C. Kapteyn, W. F. Schlotter,听鈥淭abletop听soft x-ray Fourier transform holography with 50 nm resolution,鈥听Optics Letters听34, 1618 (2009).听
  13. R. L. Sandberg, A. Paul, D. A. Raymondson, S. H盲drich, D. M. Gaudiosi, J. Holtsnider, R. Tobey, O. Cohen, M. M. Murnane, H. C. Kapteyn, C. Song, Ji. Miao, Y. Liu, F. Salmassi,听鈥淟ensless diffractive imaging using听tabletop听coherent high-harmonic soft-X-ray听beams,鈥听Physical Review Letters听99, 098103 (2007).听